| 摘要 |
<p>This invention provides an apparatus for producing trichlorosilane, comprising a reactor formed of quartz, a heating mechanism for heating the reactor, and a gas spray mechanism for spraying a supply gas containing tetrachlorosilane and hydrogen against the reactor. The reactor has an arc-shaped recessed face, and the gas spray mechanism may be provided with a jet nozzle for jetting the supply gas toward the arc-shaped recessed face in the reactor.</p> |
