| 摘要 |
<P>PROBLEM TO BE SOLVED: To suppress liquid from spreading during exposure by an immersion method even if a liquid that easily fits with an object or a liquid that has no appropriate liquid-repellent coat is used. <P>SOLUTION: The exposure method for exposing a substrate P with an exposure light via an optical member 2 and a liquid LQ comprises: a first step of forming an immersion space between the optical member 2 and substrate P by supplying the liquid LQ to the inside of a nozzle member 70 that is disposed to surround a light path of the exposure light, tubular, and is formed with an inclined plane 72A with an acute angle on a lateral surface of one end side opposite to which the substrate P is disposed; and a second step of holding at least part of the liquid LQ that leaks out of the nozzle member 70 by the inclined plane 72A. <P>COPYRIGHT: (C)2008,JPO&INPIT |
