| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sulfonium salt hardly migrating to a water phase in a resist for liquid immersion exposure. <P>SOLUTION: The sulfonium salt is represented by formula (1) [wherein, R<SB>1</SB>and R<SB>2</SB>are the same or different, and are each a 1-18C alkyl, a 1-18C alkoxy or a 1-8C perfluoroalkyl; m and n are the same or different and are each 1-5; m R<SB>1</SB>s and n R<SB>2</SB>s are the same or different; R<SB>3</SB>is a 1-18C alkyl, a 1-18C alkoxy, a 1-8C perfluoroalkyl or a group of formula (2); when R<SB>3</SB>is a 1-18C alkyl, a 1-18C alkoxy or a 1-8C perfluoroalkyl, k is 0-5; k R<SB>3</SB>s are the same or different, and when R<SB>3</SB>is a group of formula (2), k is 1; and X<SP>-</SP>is an anion]. <P>COPYRIGHT: (C)2008,JPO&INPIT |
