| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an inspection method in which problems associated with product reliability and those associated with manufacturing steps are reflected at an early stage, by detecting an influence of a photo-electric effect on a thin film transistor at an early stage. <P>SOLUTION: The inspection method is applied to an inspection of defects in a liquid crystal display thin film transistor array substrate, and includes: providing inspection equipment which comprises a chamber, a platform, a light emission mechanism, and an electrical characteristics testing mechanism placed in the chamber; placing the liquid crystal display thin film transistor array substrate on the platform; irradiating the liquid crystal display thin film transistor array substrate with light by using the light emission mechanism; and inspecting electrical characteristics of the liquid crystal display thin film transistor array substrate after irradiation with the light emission mechanism by using the electrical characteristics testing mechanism. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
