| 摘要 |
A MEMS microphone is fabricated into an integrated physical device which also comprises a solar cell. The solar cell provides power to the MEMS microphone, and may do so with use of a capacitor, which may also be incorporated into the device, and serves to provide power to the MEMS microphone when the solar cell is unable to do so (e.g., at night). A wireless transmitter and antenna may also be incorporated into the device, in order to transmit acoustic data which has been captured by the MEMS microphone. In one embodiment of the invention, the MEMS microphone comprises a fixed backplate and a diaphragm, and the solar cell is advantageously comprised in the diaphragm thereof.
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