| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a reflection electrode in which a metal layer constituting the reflection electrode is directly connected to an oxide conductive film constituting a transparent electrode not through a barrier metal layer, and which has high reflectance and low contact resistance even when being subjected to a low temperature heat treatment of about ≥100°C and ≤300°C, for example, and also has excellent heat resistance without causing any defects such as a hillock. <P>SOLUTION: The reflection electrode is composed of an Al-Ni alloy thin film including 0.1-2 atom% Ni, wherein the Al-Ni alloy thin film 2 is directly connected to the oxide conductive film 1. <P>COPYRIGHT: (C)2008,JPO&INPIT |
