| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a temperature sensitive micro-machined one shot valve capable of easily setting the opening temperature of a valve, free of leakage at the opening temperature or lower, resistant to a high pressure difference, usable in either liquid or gas environment, and miniaturizable. <P>SOLUTION: The temperature sensitive micro-machined one shot valve comprises a silicon substrate 100, a channel 101 formed passing through the whole thickness of the silicon substrate, and a low-melting-point metal member 102 welded onto one face of the silicon substrate and arranged blocking the channel. In this case, a metal layer 103 exists between the low-melting-point metal member and the silicon substrate, and an adhesive layer 104 exists between the silicon substrate and the metal layer. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
