| 摘要 |
PROBLEM TO BE SOLVED: To reduce variation in a capacitance value by reducing fringing capacitance while keeping reliability and high integration degree in MIM capacitance. SOLUTION: While maintaining area of bottom, the shape of an upper electrode 403 is formed in a way that the distance to a bottom electrode 405 becomes larger as it goes to upper portion. While the MIM capacitance value is maintained, and reliability and high integration degree in MIM capacitance are kept, the fringing capacitance can be reduced and the variation of the capacitance value can be reduced. COPYRIGHT: (C)2008,JPO&INPIT
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