| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating device which can prevent a gelled coating liquid from being supplied to a nozzle in supplying the coating liquid continuously to the nozzle by alternately using a plurality of coating liquid supply tanks, and to provide a coating method. SOLUTION: Upon the exhaustion of the coating liquid inside the coating liquid supply tank 10 to a last droplet, air penetrates into an individual supply pipe 11, and this entrapment of the air is detected by a sensor 14. Then a switching valve 12 is turned off by a signal from the sensor 14 and the flow path of a three-way valve 13 is switched over to the spent liquid tank 50 side. COPYRIGHT: (C)2008,JPO&INPIT
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