| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an easy-to-assemble inertia drive actuator with high position sensing precision. <P>SOLUTION: The inertia drive actuator comprises a fixed member 10, an oscillatory substrate 30 arranged on the fixed member 10, a moving element 40 arranged on the oscillatory substrate 30, and a piezoelectric element 20 for reciprocating the oscillatory substrate 30 above the fixed member 10. The moving element 40 has a first electrode 41, and the oscillatory substrate 30 has a second electrode 31 wherein the first electrode 41 and the second electrode 31 oppose each other through an insulating film 35. The second electrode 31 is composed of a plurality of electrode elements 31a arranged along the drive axis x, and an area at a portion opposing the first electrode 41 varies periodically as the moving element 40 moves. The inertia drive actuator further comprises a means 70 for controlling the frictional force between the oscillatory substrate 30 and the moving element 40 by applying a voltage between the first electrode 41 and the second electrode 31, and a means 80 for detecting the position of the moving element 40 based on capacitance at the opposing portion of the first electrode 41 and the second electrode 31. <P>COPYRIGHT: (C)2008,JPO&INPIT |
