发明名称 SEMICONDUCTOR DEVICE, MANUFACTURING METHOD THEREOF, AND DISPLAY DEVICE
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a semiconductor device, along with its manufacturing method and a display device, which is excellent in on-characteristics, off-characteristics, and reliability. <P>SOLUTION: The semiconductor device has such structure as a gate electrode, a gate insulating layer, and a semiconductor layer are stacked in this order on an insulating substrate, as well as a structure in which a source/drain is electrically connected to the semiconductor layer through a contact layer. The semiconductor layer has such structure as a low-crystallinity semiconductor layer in which an amorphous phase and crystal phase are present together and a high-crystallinity semiconductor layer having a higher crystallizing rate than the low-crystallinity semiconductor layer are sequentially stacked from the contact layer side. <P>COPYRIGHT: (C)2008,JPO&INPIT</p>
申请公布号 JP2008124392(A) 申请公布日期 2008.05.29
申请号 JP20060309312 申请日期 2006.11.15
申请人 SHARP CORP 发明人 MORIGUCHI MASAO
分类号 H01L29/786;G02F1/1368;H01L21/205;H01L21/336 主分类号 H01L29/786
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