| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a low-thermal-expansion ceramic member and a manufacturing method thereof wherein the method can be applied widely to low-thermal-expansion ceramic materials even though their kinds are miscellaneous, and the member can stabilize in a long term its inner electrodes formed in the surface of its low-thermal-expansion ceramic dielectric portion, and further, the structure of the member is so made hard to damage its dielectric portion too that its performance as an electrostatic chuck can be stabilized in a long term. <P>SOLUTION: The low-thermal-expansion ceramic member has a low-thermal-expansion ceramic base, electrodes provided on the low-thermal-expansion ceramic base, and a low-thermal-expansion ceramic dielectric portion for covering the electrodes. The structure of each electrode is the laminated structure comprising a first layer made of the nitride or composite nitride of periodic-table IVa-group elements, the nitride or composite nitride of periodic-table Va-group elements, or the nitride or composite nitride of periodic-table VIa-group elements, and comprising a second layer made of periodic-table IVa-, Va-, or VIa-group elements. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
