| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a liquid crystal device with excellent reliability by preventing occurrence of stepped cut of a conductive layer on the boundary of a contact hole in a laminated contact hole structure with a plurality of contact holes laminated together. <P>SOLUTION: The liquid crystal device 100 is equipped with a plurality of interlayer insulating films 12, 15 disposed on a first conductive layer 35d, the plurality of contact holes 45, 47b arranged on the plurality of interlayer insulating films 12, 15 so as respectively to communicate with them, and a second conductive layer (a drain electrode 32 and a pixel electrode 9) covering inside wall surfaces of the plurality of contact holes 45, 47b and electrically connected to the first conductive layer 35d, wherein, with respect to the plurality of contact holes 45, 47b, the contact hole 47b arranged on the upper layer side is formed so as to be larger than the contact hole 45 arranged on the lower layer side. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
