| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a ceramic-coated member which is inhibited from occurrence of particles and has excellent corrosion resistance and durability and to provide a method of manufacturing the ceramic-coated member by which a ceramic film hardly causing occurrence of particles and having excellent corrosion resistance and durability is easily formed on a complicate shaped base material or a large-sized base material. <P>SOLUTION: The ceramic-coated member has structure in which the ceramic film having≥98% purity,≥0.05μm and≤10μm film thickness and≤50 nm average particle diameter is formed on the surface of the base material. The ceramic film is formed by wet-forming a coating film using a solution containing at least one kind of a metal alkoxide, an organic metal complex, an oxide nanoparticle or a non-oxide nanoparticle on the surface of the base material and after drying the coating film, applying heat treatment to the dried coating film at≥300°C and≤1,000°C. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
