| 摘要 |
PROBLEM TO BE SOLVED: To provide a force detector capable of stably obtaining desired characteristics. SOLUTION: The force detector 10 includes a semiconductor substrate 20 and a block 50. The semiconductor substrate 20 has a groove 40 formed in its surface, has a mesa step 24 formed thereon crossing the groove 40, and has an impurity introduction area 22 formed thereon and passing through the mesa step 24 extending a boundary between the mesa step 24 and the groove 40. The block 50 seals the groove 40 by abutting on the surface of the semiconductor substrate 20 positioned around the groove 40 and one end of the introduction area 22. The one end of the introduction area 22 can be electrically connected via the block 50 to an external electric current source. COPYRIGHT: (C)2008,JPO&INPIT
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