| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a thin-film magnetic head, by which sticking of a foreign substance to a medium confronting surface. SOLUTION: An SIO<SB>2</SB>film 30 is formed on the undercoat film 12 of a substrate, except for an ABS working areaαand a lower shield forming area for forming a medium confronting surface. Then, a recess 12a corresponding to the lower shield forming area is formed on the undercoat film 12, and a lower shield layer 13 made of a soft magnetic material is formed on the surface on the undercoat film 12 including the recess 12a and the SiO<SB>2</SB>film 30. By using the SiO<SB>2</SB>film 30 as a polishing stopper, the lower shield layer 13 is polished until the SiO<SB>2</SB>film 30 is exposed to parts other than the ABS working areaαand the lower shield forming area. COPYRIGHT: (C)2008,JPO&INPIT
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