SHEET STORING CARRIER SYSTEM AND RETICLE CASE MAKING USE OF THE SAME

摘要

A system comprising sheet storing pressure container (3) including a container main body for storing one or two or more sheets, a lid member mounted so as to cover the container main body and seal (11) for airtightly isolating from external environment any storage space (17) created within when the container main body is covered and closed by the lid member, and comprising pressure feeding unit (4) for feeding pressure into the storage space of the sheet storing pressure container so as to regulate the pressure within the storage space to a set pressure higher than external pressure. Consequently, the interior of the storage space can be maintained at a high cleanliness for a prolonged period of time.