| 摘要 |
PROBLEM TO BE SOLVED: To provide a forming method for the transparent conductive film shortening time for making a substrate temperature reach the target temperature and improving the heat efficiency. SOLUTION: The forming method for the transparent conductive film has an insulating oxide film, containing metal arranged on one main surface, uses a substrate constituted of glass, applies heat processings on the substrate and forms the transparent conductive film on the other main surface of the substrate. COPYRIGHT: (C)2008,JPO&INPIT
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