| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus which copes with the problem of accumulation of powdery products to the apparatus by improving the structural arrangement of the apparatus. SOLUTION: The apparatus for depositing an internal protective film to a thermoplastic container by microwave plasma is equipped with a plurality of treating stations 1, each of the treating stations having a chamber 2 and a cover 3 containing a vacuum pump chamber communicating with a functional constituent member. The functional constituent member is assembled as one detachable unit 7 attachable to the cover, and received in respective housings provided on the connecting face 8 of the detachable unit. The cover is necessary for the functional constituent member, and has a functional connecting part 16 appearing on the complementarily agreed connecting face 9 built in. When mutually cooperating respective connecting faces of the detachable units are attached to the cover, these connecting parts and these housings are respectively connected. COPYRIGHT: (C)2008,JPO&INPIT
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