| 摘要 |
PROBLEM TO BE SOLVED: To provide a three-dimensional microscopic system for taking an exact three-dimensional image in an optical axis direction by eliminating the deviation of an interval for acquiring an image when acquiring the continuous three-dimensional images. SOLUTION: The three-dimensional microscopic system moves the focal position of an objective 4 in the optical axis direction by an actuator 5 and allows the actuator 5 to perform scanning in the optical axis direction based on a scanning waveform signal generated by a waveform generator 7, wherein the three-dimensional microscopic system includes a focus error detection optical system 6 for detecting the deviation of the focal position from a focused position and a control means 8 for controlling the actuator 5 so that a focus error signal output from the focus error detection optical system 6 may follow up the scanning waveform signal. COPYRIGHT: (C)2008,JPO&INPIT
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