| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring instrument capable of measuring inexpensively and precisely an eccentricity value of a disk body in a disk substrate or the like. SOLUTION: The disk body 140 to be measured provided with a circular hole 141 in its center is supported by grooves 115 formed on side faces of a driving roller 111 and driven rollers 112, 113. A driving motor part 114 rotates the disk body 140 to be measured, via the driving roller 111, when receiving an indication for starting an operation from a control part 130, and rotates the disk body 140 to be measured by one cycle (i.e. 360°of rotation). A dimension measuring instrument 120 measures sequentially radial distances between an inner circumferential edge and an outer circumferential edge of the disk body 140 to be measured, in a plurality of circumferential-directional portions of the disk body 140 to be measured (for example, in every prescribed angle of rotation), along with the rotation of the disk body 140 to be measured, and outputs a measured result to the control part 130. The control part 130 analyzes the measured result to find an eccentric amount of circular hole 141, when finishing the measurement about the whole circumference of the disk body 140 to be measured. COPYRIGHT: (C)2008,JPO&INPIT
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