发明名称 METHOD FOR POLISHING A MEMORY OR RIGID DISK WITH AN AMINO ACID-CONTAINING COMPOSITION
摘要 A method of planarizing or polishing the surface of a memory or rigid disk comprising abrading at least a portion of the surface with (i) a polishing composition comprising an oxidizing agent selected from the group consisting of persulfates and peroxides, an amino acid, and water; and (ii) an abrasive.
申请公布号 WO0174959(A8) 申请公布日期 2008.05.29
申请号 WO2001US10694 申请日期 2001.04.03
申请人 CABOT MICROELECTRONICS CORPORATION 发明人 FANG, MINGMING;WANG, SHUMIN
分类号 B24B37/00;C09G1/02;C09K3/14 主分类号 B24B37/00
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