发明名称 PHASE PLATE, IMAGE PRODUCING METHOD AND ELECTRON MICROSCOPE
摘要 The invention relates to a phase plate for electron-optical imaging in which the zero beam (4) is dephased in order to obtain a contrast-rich image by interference with the diffracted electron beams (5, 5'). The aim of the invention is to maintain shading of the diffracted electron beams (5, 5') as low as possible and to prevent shading that cannot be reconstructed from the acquired image data. This is achieved such that the electrode (1') is configured as a screened conductor (7) that is arranged extending from a fixation (8) in an essentially radial manner in the direction of the zero beam range (4). The screened conductor (7) comprises an end (9) in front of the zero beam range (4) such that a field, that detects said range, is formed between the conductor (7) and the screening (10) that it surrounds. The invention further relates to an image producing method for completely reconstructing the image and an electron microscope (12) comprising the phase plate (1).
申请公布号 WO2008061603(A2) 申请公布日期 2008.05.29
申请号 WO2007EP09289 申请日期 2007.10.26
申请人 CEOS CORRECTED ELECTRON OPTICAL SYSTEMS GMBH;ZACH, JOACHIM 发明人 ZACH, JOACHIM
分类号 H01J37/26 主分类号 H01J37/26
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