MOLECULAR BEAM SOURCE, MOLECULAR BEAM CRYSTAL GROWTH APPARATUS, MOLECULAR BEAM CRYSTAL GROWTH METHOD

摘要

PROBLEM TO BE SOLVED: To provide a molecular beam source that allows a reducing gas to be introduced into a growth chamber of a molecular beam crystal growth apparatus without increasing the number of ports. SOLUTION: The molecular beam source is equipped with a molecular beam emission portion emitting a molecular beam for crystal growth and a cracking zone that is connected to the molecular beam emission portion and heats and decomposes the molecular beam; and the molecular beam source has a reducing gas inlet portion between the molecular emission portion and the cracking zone to introduce a reducing gas. COPYRIGHT: (C)2008,JPO&INPIT