| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection measuring device capable of continuing observation efficiently with a high-power objective lens as it is, by dispensing with operation wherein, in an inspection device using a microscope, it is determined whether an object is within a visual field of the high-power objective lens at every time when changing the object, and when being out of the visual field, switching to a low-power objective lens is performed again, and a pattern position is confirmed, and then switching to the high-power objective lens is performed. SOLUTION: A pattern is photographed beforehand by the low-power objective lens, and its image and its coordinate position are registered. When observing by the high-power objective lens, the registered low-power image and a visual field domain 31 of the high-power objective lens are displayed on a low-power image screen 32. When the visual field domain of the low-power image is moved by a mouse, a stage is controlled sequentially, and an objective pattern can be positioned easily within a high-power objective lens visual field, to thereby dispense with switching to the low-power objective lens. COPYRIGHT: (C)2008,JPO&INPIT |
