Micromechanical thermopile sensor for use as membrane sensor for detecting infrared radiation, has conductive areas laterally distanced from each other and electrically contacted at their upper and/or lower end areas as thermopile structure

摘要

The thermopile sensor (30) has two vertically running conductive areas (11, 16) made of electrical conductive materials with different seebeck coefficients. The conductive areas are laterally distanced from each other and are electrically contacted at their upper and/or lower end areas as a thermopile structure (18). Vertically extending trenches (15) are formed between the conductive areas. An absorber layer (34) for absorption of infrared radiation is laid on a membrane (36). Walls of the areas are covered with an oxide surface and/or nitride surface. An independent claim is also included for a method for manufacturing a micromechanical thermopile sensor.