| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an angular velocity sensor that allows a low profile design. <P>SOLUTION: The sensor includes a detection element 1 having two rectangular arms formed by connecting a first arm 2 to a second arm 4 approximately in the rectangular direction, a support 6 for supporting two first arms 2, a fixed part 9 connected to the support 6 and fixed to a mounting substrate, and a weight 11 connected to the tip of the second arm 4. The sensor has an arrangement wherein the second arm 4 is bent up to the facing state to the second arm 4 itself, and is provided with a driving means 17 for driving and vibrating the weight in the facing direction to the second arm 4, and each bent second arm driving electrode 17b is arranged in the mutually crossing state. <P>COPYRIGHT: (C)2008,JPO&INPIT |
