| 摘要 |
PROBLEM TO BE SOLVED: To provide a defect detection method and device for performing defect inspection in the course of conveying a detecting object. SOLUTION: This defect detection device 10 is equipped with: a handling robot 12 with its arm 14 provided with a holding part 18 for the detecting object 48; an exciting nozzle 26 jetting gas toward the detecting object 48; a vibration sensor 44 having, as a measurement range, at least a part of the moving range of the detecting object 48 held by the handling robot 12; a linear predictive coefficient calculation means extracting a characteristic quantity from a vibration waveform obtained by the vibration sensor 44; and a determination means finding a correlation between the characteristic quantity and a previously found reference characteristic quantity to check on the existence of a defect. COPYRIGHT: (C)2008,JPO&INPIT |
