SELF-TESTING MICROMECHANICAL PRESSURE SENSOR

摘要

The invention allows an autonomous test of the membrane of a micromechanical membrane sensor. For such a self-test, the membrane comprises a heating element and means for detecting the deflection. For carrying out the test, the membrane is heated by the heating element to such an extent that it bends due to the thermal expansion of the membrane material. This bend produces a measurable value in the corresponding detection element depending on the deflection of the membrane. If a predetermined deflection of the membrane is obtained during the predetermined heating, it can be concluded that the membrane is operational. If, however, the predetermined deflection is not obtained, it can be concluded that the membrane is defective.