SCANNING ELECTRON MICROSCOPE WITH TIME CONSTANT MEASUREMENT FUNCTION MOUNTED

摘要

PROBLEM TO BE SOLVED: To provide a scanning electron microscope capable of determining an optimum scanning method which reduces deflection amounts of primary electron beams and secondary electrons, and obtaining a stable image. SOLUTION: Energy is discriminated by using an energy filter, fluctuation of sample potential is measured from a change of obtained electron yield, and a time constant of charge formed in radiating an electron beam is extracted. A scanning method is optimized on the basis of the extracted time constant, and distortion appearing in an SEM image and magnification fluctuation are suppressed. COPYRIGHT: (C)2008,JPO&INPIT