ELECTROSTATIC ACTUATOR, LIQUID DROP DISCHARGE HEAD AND MANUFACTURING METHOD THEREFOR, AND LIQUID DROP DISCHARGE APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide an electrostatic actuator capable of improving generated pressure in an actuator, while ensuring required basic characteristics as the electrostatic actuator, and to provide a liquid drop discharge head and a method of manufacturing the electrostatic actuator, and the liquid drop discharge head. SOLUTION: The electrostatic actuator comprises a fixed electrode formed on a substrate; a movable electrode arranged so as to face the fixed electrode via a prescribed gap; a drive means for generating an electrostatic force between the fixed and movable electrodes for generating displacement in the movable electrode; a first insulating film 7 formed on the opposite surface of the fixed electrode; and a second insulating film 8 formed on the facing surface of the movable electrode. In at least one of the first and second insulating films, dielectric materials having relative dielectric constants that are higher than that of a silicon oxide are laminated. COPYRIGHT: (C)2008,JPO&INPIT