| 摘要 |
PROBLEM TO BE SOLVED: To provide an evaporative cooling device capable of preventing a cooling object from being excessively cooled and preventing temperature hunting. SOLUTION: A jacket 2 is disposed at the outer periphery of a reaction pot 1. A cooling fluid pipe conduit 6 is laid in the jacket 2. The cooling fluid pipe conduit 6 has a cooling fluid jetting port composed of a thermally-actuated member. In the case of cooling the reaction pot 1, only the cooling fluid heated to a prescribed temperature is jetted from the cooling fluid pipe conduit 6 into the jacket 2, so that the reaction pot 1 can be prevented from being excessively cooled. COPYRIGHT: (C)2008,JPO&INPIT
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