HYDROGEN SENSOR AND HYDROGEN GAS DETECTOR

摘要

A thin film layer is formed on the surface of a planar light transmission path in a hydrogen sensor, and a catalyst layer is formed on the surface of the thin film layer. A first boundary surface is formed between the planar light transmission path and the thin film layer, and a second boundary surface is formed between the planar light transmission path and a substrate when the substrate is bonded to the backside of the planar light transmission path. Light from a light source is allowed to enter from the incident portion while being diffused to the first end side of the planar light transmission path, and then the light is reflected alternately off the first and second boundary surfaces and transmitted to the second end side of the planar light transmission path. That light exiting the second end side is transmitted to a photosensor by an exiting/condensing portion. When the thin film layer is hydrogenated by the catalyst layer touching hydrogen, the quantity of light reflecting off the first boundary surface decreases. Decrease in quantity of light is detected by the photosensor to thereby detect hydrogen.