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发明名称
PROCESS FOR PRODUCING POLYSILICON FILM
摘要
申请公布号
KR100833761(B1)
申请公布日期
2008.05.29
申请号
KR20020010374
申请日期
2002.02.27
申请人
发明人
分类号
G02F1/1368;H01L21/477;C30B13/00;H01L21/20;H01L21/336;H01L21/66;H01L29/786
主分类号
G02F1/1368
代理机构
代理人
主权项
地址
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