| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an aligner capable of improving throughput. <P>SOLUTION: The aligner comprises: a first optical member for emitting an aligning beam; a first moving body movable while holding a substrate in a first area including a first position to be irradiated with the aligning beam from the first optical member; a second moving body movable while holding the substrate independent of the first moving body in the first area; and a driving device for moving the first moving body by a first moving track in the first area in order to irradiate the substrate held by the first moving body with the aligning beam and moving the second moving body by a second moving track different from the first moving track in the first area so as to irradiate the substrate held by the second moving body with the aligning beam. <P>COPYRIGHT: (C)2008,JPO&INPIT |
