| 摘要 |
PROBLEM TO BE SOLVED: To perform stable cooling by controlling a cooled object more accurately to a cooling target temperature. SOLUTION: This cooling device comprises a vacuum cooling means 4 for vacuum-cooling the cooled object 3 in a cooling chamber 2; a cold air cooling means 5 for cooling the cooled object by cold air; a control means 6 for controlling the vacuum cooling means 4 and the cold air cooling means 5; and detecting means 26, 27 for detecting the temperature of the cooled object 3 and temperature in the cooling chamber 2. At controlling the cooled object 3 to the cooling target temperature by vacuum-cooling by the vacuum cooling means 4 and the following cold air cooling by the cold air cooling means 5, the control means 6 performs the cold air cooling by the cold air cooling means 5 for a set time to hold the temperature of the cooled object 3 or the temperature in the cooling chamber 2 detected by the detecting means 26, 27 to the cooling target temperature after the temperature of the cooled object 3 or the temperature in the cooling chamber 2 detected by the detecting means 26, 27 reaches the cooling target temperature. COPYRIGHT: (C)2008,JPO&INPIT
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