IMPROVED BUBBLER FOR THE TRANSPORTATION OF SUBSTANCES BY A CARRIER GAS
摘要
A bubbler (2) for delivering liquid or solid metalorganic compounds to a reactor site. The bubbler has an inner and outer chamber and has a member (14) positioned between its inlet (6) and outlet (8) that is provided with a plurality of apertures therein. The member (14) is preferably in the form of a perforated disc having a predefined density of apertures therein to provide optimum pick up and flow of carrier gas through the bubbler.
申请公布号
WO2007057631(A3)
申请公布日期
2008.05.29
申请号
WO2006GB03801
申请日期
2006.10.12
申请人
SIGMA-ALDRICH CO.;CUNNING, HUGH;WILLIAMS, GRAHAM;ODEDRA, RAJESH;KANJOLIA, RAVI
发明人
CUNNING, HUGH;WILLIAMS, GRAHAM;ODEDRA, RAJESH;KANJOLIA, RAVI