| 摘要 |
A polishing composition, and a method for polishing a silicon oxide or silicon nitride layer on a polysilicon layer by using the composition are provided to improve the polishing selectivity of a silicon oxide or silicon nitride layer to a polysilicon layer. A polishing composition comprises an abrasive grain selected from silica and ceria; an alkali selected from ammonia, ammonium salts, alkali metal salt and alkali metal hydroxides; and an organically modified silicone oil selected from polyoxyethylene modified silicone oil, poly(oxyethylene oxypropylene) modified silicone oil, epoxy/polyether modified silicone oil and amino/polyether modified silicone oil.
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