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发明名称
摘要
申请公布号
JP4091242(B2)
申请公布日期
2008.05.28
申请号
JP20000313770
申请日期
2000.10.13
申请人
发明人
分类号
H01L29/78;H01L21/265;H01L21/336;H01L29/08;H01L29/10
主分类号
H01L29/78
代理机构
代理人
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地址
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