ABRASIVE FILM AND METHOD OF PRODUCING THE SAME

摘要

A polishing film includes a plastic film and a polishing layer formed on its surface, having a mixture of a first group of silica particles with a first average diameter and a second group of silica particles with a second average diameter fixed in a resin binder, the first average diameter and the second diameter being different from each other and both within a range of 0.001-10 mum. The mixture of the two groups of silica particles has a granularity distribution curve with two peaks at two different diameter values corresponding to the first and second average diameters.