发明名称 |
Transistors or memory capacitors comprising a composition of HfO2 with enhanced dielectric constant |
摘要 |
The present invention is related to a novel composition comprising HfO2 and a second compound, charactherized in that at least a part of the composition is in the cubic crystallographic phase. The novel composition advantageously is stable at temperatures up to 1200 degrees C. The novel composition advantageously has a dielectric value that is higher than the dielectric value of pure HfO2. <??>The novel composition can be used for the application of dielectric material in memory capacitor applications and for the application as gate dielectric in transistor applications. <IMAGE> |
申请公布号 |
EP1372160(B1) |
申请公布日期 |
2008.05.28 |
申请号 |
EP20030447146 |
申请日期 |
2003.06.10 |
申请人 |
INTERUNIVERSITAIR MICROELEKTRONICA CENTRUM (IMEC) |
发明人 |
CARTIER, EDUARD;CHEN, JERRY;ZHAO, CHAO |
分类号 |
C01G27/00;H01B3/10;C01G27/02;C23C16/40;C23C16/44;H01L21/02;H01L21/28;H01L21/316;H01L21/8242;H01L27/108;H01L29/04;H01L29/51;H01L29/78 |
主分类号 |
C01G27/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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