发明名称 |
Method for manufacturing silicon epitaxial wafers |
摘要 |
<p>A method for manufacturing an epitaxial wafer includes: a step of pulling a single crystal from a boron-doped silicon melt in a chamber based on a Czochralski process; and a step of forming an epitaxial layer on a surface of a silicon wafer sliced from the single crystal. The single crystal is allowed to grow while passed through a temperature region of 800 to 600°C in the chamber in 250 to 180 minutes during the pulling step. The grown single crystal has an oxygen concentration of 10 x 10 17 to 12 x 10 17 atoms/cm 3 and a resistivity of 0.03 to 0.01 ©cm. The silicon wafer is subjected to pre-annealing prior to the step of forming the epitaxial layer on the surface of the silicon wafer, for 10 minutes to 4 hours at a predetermined temperature within a temperature region of 650 to 900°C in an inert gas atmosphere. The method is to fabricate an epitaxial wafer that has a diameter of 300 mm or more, and that attains a high IG effect, and involves few epitaxial defects.</p> |
申请公布号 |
EP1926134(A1) |
申请公布日期 |
2008.05.28 |
申请号 |
EP20070021018 |
申请日期 |
2007.10.26 |
申请人 |
SUMCO CORPORATION |
发明人 |
KOIKE, YASUO;ONO, TOSHIAKI;IKEDA, NAOKI;KATANO, TOMOKAZU |
分类号 |
H01L21/322;C30B15/20;C30B25/20;C30B29/06;C30B33/02 |
主分类号 |
H01L21/322 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|