发明名称 Improved interdigitated capacitive structure for an integrated circuit
摘要 System and method for an improved interdigitated capacitive structure for an integrated circuit. A preferred embodiment comprises a first layer of a sequence of substantially parallel interdigitated strips, each strip of either a first polarity or a second polarity, the sequence alternating between a strip of the first polarity and a strip of the second polarity. A first dielectric layer is deposited over each strip of the first layer of strips. A first extension layer of a sequence of substantially interdigitated extension strips is deposited over the first dielectric layer, each extension strip deposited over a strip of the first layer of the opposite polarity. A first sequence of vias is coupled to the first extension layer, each via deposited over an extension strip of the same polarity. A second layer of a sequence of substantially parallel interdigitated strips can be coupled to the first sequence of vias.
申请公布号 EP1806783(A3) 申请公布日期 2008.05.28
申请号 EP20060013378 申请日期 2006.06.28
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. 发明人 CHEN, YUEH-YOU;CHANG, CHUNG-LONG;CHAO, CHIH-PING
分类号 H01L23/522 主分类号 H01L23/522
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