Method for preparing a high resolution pattern with direct writing means,申请号KR20050129694-传众专利搜索

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发明名称	Method for preparing a high resolution pattern with direct writing means
摘要
申请公布号	KR100833017(B1)	申请公布日期	2008.05.27
申请号	KR20050129694	申请日期	2005.12.26
申请人		发明人
分类号	H01L21/32	主分类号	H01L21/32
代理机构		代理人
主权项
地址

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