LASER ANNEALING DEVICE, ANNEALING METHOD, AND MELTING-DEPTH MEASURING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a technique measuring the depth of the melting section of a laser-beam incident place of an annealing object by a noncontact. SOLUTION: A laser beam source for an annealing projects pulse laser beams for the annealing to the annealing object held to a stage. Laser beams for a measurement are projected in a region, in which the pulse laser beams for the annealing are projected, from a light source for a measurement. A reflected-light detector detects the intensity of the reflected light of laser beams for the measurement. A controller computes the melting depth of a section temporarily melting the annealing object by the incidence of the pulse laser beams for the annealing on the basis of the time change of the intensity of the reflected light detected by the reflected-light detector. COPYRIGHT: (C)2008,JPO&INPIT