发明名称 OPTICAL ELEMENT HOLDING APPARATUS AND EXPOSURE APPARATUS
摘要 A holding apparatus for holding an optical element includes a measuring part configured to measure a coordinate of the optical element, and a driving part configured to move the optical element based on the coordinate measured by the measuring part, wherein the measuring part includes a first sensor configured to detect a displacement amount of a part of the optical element, and a second sensor configured to detect that a part of the optical element is located at a predetermined position.
申请公布号 US2008117534(A1) 申请公布日期 2008.05.22
申请号 US20070925373 申请日期 2007.10.26
申请人 CANON KABUSHIKI KAISHA 发明人 ONUKI ICHIRO;KOBAYASHI KENICHI;YOSHIDA KENJI;OTA JUN
分类号 G02B7/04 主分类号 G02B7/04
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