| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma generator unit, a reactor and a light source apparatus which allow for temperature control and size reduction. <P>SOLUTION: A plasma generator unit 1 has electrodes 15A, 15B, 15C, 15D for generating plasma in discharge spaces 5A, 5B, 5C, a flow path 17 where electrodes 15A, 15B, 15C, 15D are fixed to enable temperature control of the plasma generator unit 1 by flowing the fluid along the electrodes 15A, 15B, 15C, 15D, and a base unit 3 served as dielectrics formed in an integrated manner. <P>COPYRIGHT: (C)2008,JPO&INPIT |
