| 摘要 |
PROBLEM TO BE SOLVED: To suppress a plant cost and a space by reducing cassette ports even when the number of types is increased, so as to suppress the enlargement of a transfer device concerning the transfer device for storing cassettes by discrimination by each type of glass substrates. SOLUTION: (I) The cassette ports CSP are arranged, whose number is obtained by adding one to the number of types. (II) The transfer device has a function as follows. (1) The types of the cassette ports are released. (2) When the cassette port set to the type does not exist in storing the glass substrate, the cassette port is set to the cassette port of the type, so as to store the glass substrate in the cassette CS of the cassette port. (3) When the cassette is filled with the glass substrates, the cassette is collected, the setting of the types of the cassette port is released, and the cassette is supplied onto the cassette port. COPYRIGHT: (C)2008,JPO&INPIT
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