| 摘要 |
PROBLEM TO BE SOLVED: To achieve a vibration sensor which can make a shell high pressure-resistant. SOLUTION: The vibration sensor using a vibrator includes: a silicon substrate with a groove formed; the vibrator formed in a hollow of the groove of the silicon substrate; a shell which has two etching liquid introducing holes formed on the silicon substrate and has a first space between the silicon substrate; and a silicon film which is formed on the shell and in regions of the silicon substrate, the regions being positioned under each of two etching liquid introducing holes. The two etching liquid introducing holes are formed at a voluntary position on both sides in a transverse direction of the vibrator, respectively, or are formed at a voluntary position on the same side in the transverse direction of the vibrator, and have a gap connecting between the two etching liquid introducing hole and the first space, between the silicon substrate adjacent the two etching liquid introducing holes and the shell, respectively. COPYRIGHT: (C)2008,JPO&INPIT
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