| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a carrier cassette by which an appropriate holding state corresponding to the thickness of large substrates can be obtained. <P>SOLUTION: The vertical position of back supports 26 which are arranged between side panels 13, 13 in a vertically movable manner can be moved by a moving mechanism 30. When the large substrates 3 are relatively thick, the back supports 26 are moved downward by the moving mechanism 30 so that the large substrates 3 may not get into contact with the back supports 26. When the large substrates 3 are relatively thin, the back supports 26 are moved upward by the moving mechanism 30 and the large substrates 3 are supported by side supports 21 and the back supports 26. In this manner, an appropriate holding state corresponding to the thickness of the large substrates 3 can be obtained. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
